Waveguide-type optical control device and process for producing the same

ABSTRACT

Two right and left optical waveguides are provided so as to pass through a first directional coupler, a phase shifter, and a second directional coupler and so that directional couplers are provided in the first directional coupler portion and the second directional coupler portion. A third electrode is provided between these optical waveguides. A first electrode is provided on the left side of the left optical waveguide, and a second electrode is provided on the right side of the right optical waveguide. These electrodes are extended into the first directional coupler. Upon the application of a bias voltage, the voltage is simultaneously applied to all the first to third electrodes. By virtue of this construction, a waveguide-type optical control device can be realized which, in a directional coupler-type Mach-Zehnder (MZ) construction, can improve the extinction ratio without the complication of the construction.

FIELD OF THE INVENTION

The invention relates to a waveguide-type optical control device and aprocess for producing the same, and more particularly to awaveguide-type optical control device, which has a directionalcoupler-type Mach-Zehnder construction and can improve the ratio of theminimum attenuation level to the maximum attenuation level (extinctionratio) without complicating the construction, and a process forproducing the same.

BACKGROUND OF THE INVENTION

Waveguide-type optical control devices are suitable for integration anda reduction in power consumption, and, thus, studies have been made onthe utilization of waveguide-type optical control devices in opticalswitches or optical modulators. Further, in recent years, the spread ofdense wavelength division multiplexing (DWDM) has lead to an increasingdemand for variable optical attenuators as means for making opticalpowers of respective wavelengths uniform at the time of wavelengthmultiplexing, or as optical parts of optical ADMs (add dropmultiplexers) which select a desired wavelength and inserts/removes thewavelength in a transmission line. Among others, variable opticalattenuators having a directional coupler-type Mach-Zehnder (MZ)construction comprising two directional couplers provided on an LiNbO₃(lithium niobate; LN) substrate, which is advantageous from theviewpoints of a reduction in size, a reduction in voltage, and areduction in power consumption, and a phase shifter provided between thetwo directional couplers are being put to practical use.

FIG. 1 shows the construction of a conventional waveguide-type opticalcontrol device having a directional coupler-type Mach-Zehnderconstruction. In FIG. 1, a variable optical attenuator is exemplified asthe waveguide-type optical control device.

The variable optical attenuator having a directional coupler-typeMach-Zehnder construction comprises: optical waveguides 1 a, 1 b whichare provided parallel to each other on an LN substrate (not shown); afirst directional coupler 2 provided within the optical waveguides 1 a,1 b; a phase shifter 3 provided adjacent to the first directionalcoupler 2; and a second directional coupler 4 provided adjacent to thephase shifter 3. The phase shifter 3 comprises a first electrode 3 a, asecond electrode 3 b, and a third electrode 3 c. The third electrode 3 cis used as a common electrode. A negative (−) voltage is applied to thiselectrode from a direct current power supply 3 d, and a positive (+)voltage is applied to the first electrode 3 a and the second electrode 3b from the direct current power supply 3 d to cause an electric field.

Next, the operation of the waveguide-type optical control device(variable optical attenuator) shown in FIG. 1 will be explained. Asignal light introduced from the end of the optical waveguide 1 a isbranched in the first directional coupler 2 into signal light partswhich are to be traveled respectively through optical waveguides 1 a and1 b (branching ratio=50:50), and the branched signal lights are theninput into the phase shifter 3. The phase shifter 3 operates accordingto the magnitude of an applied voltage 31 from the direct current powersupply 3 d. When the voltage 31 is not applied from the direct currentpower supply 3 d, the branched signal lights introduced into the opticalwaveguides 1 a and 1 b are input in an identical phase into the seconddirectional coupler 4 and the whole light is output from the outputterminal of the optical waveguide 1 b while no light is output from theoptical waveguide 1 a.

Next, when the applied voltage 31 is increased from 0 (zero) volt, therefractive index of the optical waveguides 1 a and 1 b are changed and,consequently, the propagation speed of signal lights, which travelrespectively through the optical waveguides 1 a and 1 b, is changed.Since the voltage applied to the optical waveguide 1 a is opposite indirection to the voltage applied to the optical waveguide 1 b, adifference occurs in propagation speed between signal light, whichtravels through the optical waveguide 1 a, and signal light whichtravels through the optical waveguide 1 b in the phase shifter 3. As aresult, the signal light in the optical waveguide 1 a and the signallight in the optical waveguide 1 b are input in a mutually differentphase into the second directional coupler 4. For this reason, thebranching ratio (coupling rate) of the second directional coupler 4 isdeviated from the original rate 50%, and, as a result, a part of signallight, which, up to this stage, has been entirely output from theoptical waveguide 1 b in the second directional coupler 4, is alsooutput from the optical waveguide 1 a. When the applied voltage 31 isincreased to about 30 to 50 V, the signal light is substantiallyentirely output from the optical waveguide 1 a. That is, setting theapplied voltage 31 to a suitable value permits the coupling length L inthe phase shifter 3 to be equivalently changed and, consequently,permits optical output corresponding to the change to be obtained.

When the voltage 31 was not applied, or when a voltage of about 30 to 50V was applied, in order to output the whole signal light from any one ofthe optical waveguide 1 a and the optical waveguide 1 b in the seconddirectional coupler 4, the branching ratio (coupling rate) of the firstdirectional coupler 2 to the second directional coupler 4 should beaccurately brought to 50:50 (50%). To this end, the length of a portionwhere the optical waveguides 1 a and 1 b approach each other (couplinglength L=π/2γ wherein γ represents Pockels constant) should beaccurately brought to the half of the complete coupling length Lc (=π/2κwherein κ represents coupling coefficient). The deviation of thebranching ratio (coupling rate) of the first directional coupler 2 tothe second directional coupler 4 from 50:50 (50%) results in increasedleakage of the light signal from one waveguide to the other waveguide atthe output terminal of the second directional coupler 4 and thusdeteriorates the ratio of the minimum attenuation level to the maximumattenuation level (extinction ratio).

FIG. 2 shows the relationship between the gap and the coupling length ina directional coupler.

The length of a portion, where the optical waveguides la and 1 bapproaches and are coupled to each other (coupling length L), and a gapG are important to the directional coupler. In order to bring thebranching ratio (coupling rate) to 50:50 (50%), it is necessary toeliminate a variation in the gap G and to bring the coupling length L to[complete coupling length Lc÷2]. These two are important parameters fora production process of the directional coupler.

FIG. 3 shows that characteristics vary according to the productionparameters. When there is no variation in gap G shown in FIG. 2 and, atthe same time, when the coupling length L is equal to the half of thecomplete coupling length Lc, ideal characteristics 130 are obtained,that is, the crosstalk is minimized and, consequently, the extinctionratio is increased. On the other hand, when there is a variation in gapG or when the coupling length L is not equal to the half of the completecoupling length Lc, deteriorated characteristics 131 are obtained. It isknown that a change in coupling rate only by several percents from 50%causes this state.

In order to solve this problem, Japanese Patent Publication No.72964/1994 proposes a construction such that, separately from electrodesfor the phase shifter, electrodes for directional couplers are providedin the directional couplers in the optical waveguides to control therefractive index in the optical waveguides, thereby equivalentlyregulating the coupling length L. This construction will be explained inconjunction with FIG. 4.

FIG. 4 shows another conventional waveguide-type optical control device.Also in FIG. 4, a variable optical attenuator is used as thewaveguide-type optical control device.

A first directional coupler 2, a phase shifter 3, and a seconddirectional coupler 4 are disposed in series between the input terminaland the output terminal of the optical waveguides 1 a and 1 b. Forapplying a bias voltage, electrodes 20 a, 20 b are provided in the firstdirectional coupler 2, electrodes 30 a, 30 b are provided in the phaseshifter 3, and electrodes 40 a, 40 b are provided in the seconddirectional coupler 4. The refractive index in the first and seconddirectional couplers 2, 4 are controlled by properly setting the voltageapplied to the electrodes 20 a, 20 b and the electrodes 40 a, 40 b. As aresult, the coupling length L is equivalently regulated, and adeterioration in extinction ratio is improved.

Further, Japanese Patent Laid-Open No. 142569/1998 proposes adirectional coupler having a construction which can reduce the level ofleakage between optical waveguides and can improve dynamic range.Specifically, this publication proposes a construction which brings thecoupling length L in the directional coupler to a double length of thecomplete coupling length Lc or a length obtained by multiplying thecomplete coupling length Lc by an even number.

The conventional waveguide-type optical control devices, however, havethe following problems. In the construction proposed in Japanese PatentPublication No. 72964/1994 wherein dedicated electrodes areindependently provided for the phase shifter and the two directionalcouplers, the device size of the variable optical attenuator isdisadvantageously increased. Further, since the electrodes are disposedin three blocks, the number of sites where voltage control should beperformed is increased. This disadvantageously complicates theconstruction of the control circuit.

On the other hand, according to the construction proposed in JapanesePatent Laid-Open No. 142569/1998, the coupling length L is at leasttwice of the complete coupling length Lc. That is, the total length ofthe device is long, and, thus, it is impossible to reduce the size ofthe device.

SUMMARY OF THE INVENTION

Accordingly, it is an object of the invention to provide awaveguide-type optical control device, which can improve the extinctionratio and the dynamic range without the complication of the constructionand can realize a reduction in size, and a process for producing thewaveguide-type optical control device.

According to the first feature of the invention, a waveguide-typeoptical control device comprises:

first and second directional couplers provided while leaving apredetermined spacing therebetween, said first and second directionalcouplers being constituted respectively by two right and left opticalwaveguides provided on a substrate; and

a phase shifter provided between the first directional coupler and thesecond directional coupler, first, second, and third electrodes beingprovided respectively on the left side of the left optical waveguide, onthe right side of the right optical waveguide, and between the twooptical waveguides, said phase shifter functioning to control light,which passes through the two optical waveguides, according to a voltageapplied to the first, second, and third electrodes,

said first, second, and third electrodes being extended into the firstand second directional couplers.

According to this construction, the first, second, and third electrodesare extended from the phase shifter into the first and seconddirectional couplers, and, thus, the voltage applied to the phaseshifter as such is also applied to the first and second directionalcouplers to control the refractive index of the first and seconddirectional couplers. By virtue of this, since the coupling length isequivalently regulated, a deterioration in extinction ratio can besuppressed. Further, since the number of electrodes in the directionalcoupler is identical to that in the phase shifter, there is no need toincrease the size of the device, and, in addition, the complication ofthe control system can be avoided.

According to the second feature of the invention, a waveguide-typeoptical control device comprises:

a phase shifter provided with a first electrode section comprising anelectrode provided on the left side of a left optical waveguide, anelectrode provided on the right side of a right optical waveguide, andan electrode provided between the two optical waveguides; and

a directional coupler comprising two optical waveguides which areconnected respectively to the two right and left optical waveguides inthe phase shifter and are provided parallel to each other with thespacing between the two optical waveguides being partially reduced, saiddirectional coupler being used in at least one of an optical branchingsection provided on the input side of the phase shifter and an opticalcoupling section provided on the output side of the phase shifter, therefractive index of the two optical waveguides being varied according toa voltage applied across the electrodes provided respectively on theleft side of the left optical waveguide and the right side of the rightoptical waveguide and the electrode provided between the two opticalwaveguides in the phase shifter,

said directional coupler being provided with a second electrode sectioncomprising an electrode provided on the left side of the left opticalwaveguide, an electrode provided on the right side of the right opticalwaveguide, and an electrode provided between the two optical waveguides,the three electrodes constituting the second electrode section beingelectrically connected respectively to the three electrodes constitutingthe first electrode section provided adjacent to the second electrodesection in the longitudinal direction of the two optical waveguides, thevoltage applied to the first electrode section being applied to thesecond electrode section.

According to this construction, the directional coupler used in theoptical branching section or the optical coupling section comprises, inits coupling portion, a second electrode section having threeelectrodes, i.e., a first electrode provided on the left side of theleft optical waveguide, a second electrode provided on the right side ofthe right optical waveguide, and a third electrode provided between thetwo optical waveguides, and the electrodes in this second electrodesection are separately and electrically connected respectively to threeelectrodes of the first electrode section in the phase shifter, wherebythe voltage applied to the first electrode section in the phase shifteris simultaneously applied to the electrodes of the second electrodesection in the directional coupler. By virtue of this construction, therefractive index in the directional coupler is controlled by the voltageapplied to the phase shifter. As a result, the coupling length L isequivalently regulated to suppress the deterioration in extinctionratio. Further, since insulation between the electrodes in the phaseshifter and the electrodes in the directional coupler is not required,there is no need to provide a space between these electrodes. This caneliminate the need to increase the size of the waveguide-type opticalcontrol device, and, in addition, the complication of the control systemcan be avoided.

According to the third feature of the invention, a waveguide-typeoptical control device comprises:

a phase shifter comprising two left and right optical waveguides, afirst electrode provided on the left side of the left optical waveguide,a second electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides;

a first directional coupler that is connected to one end of the phaseshifter and functions to branch an optical signal introduced through oneof the two optical waveguides into optical signal parts which are thenintroduced respectively into the two optical waveguides; and

a second directional coupler that is connected to the other end of thephase shifter and functions to couple the optical signal parts receivedrespectively from the two optical waveguides,

at least one of the first and second electrodes and the third electrodehaving been extended into a part or the whole of the first directionalcoupler or the second directional coupler.

According to this construction, the first, second, and third electrodesin the phase shifter are extended into a part or the whole of the firstdirectional coupler or the second directional coupler using commonoptical waveguides. Therefore, upon the application of the voltageacross the electrodes in the phase shifter, an electric field is appliedto the phase shifter and, at that same time, is also applied to thefirst or second directional coupler, whereby the refractive index in thedirectional coupler is also controlled. As a result, since the couplinglength L is equivalently regulated, the deterioration in extinctionratio can be suppressed. Further, since insulation between theelectrodes in the phase shifter and the electrodes in the directionalcoupler is not required, there is no need to provide a space betweenthese electrodes. This can eliminate the need to increase the size ofthe waveguide-type optical control device, and, in addition, thecomplication of the control system can be avoided.

According to the fourth feature of the invention, a waveguide-typeoptical control device comprising:

a phase shifter comprising two left and right optical waveguides, afirst electrode provided on the left side of the left optical waveguide,a second electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides;

a first directional coupler that is connected to one end of the phaseshifter and functions to branch an optical signal introduced through oneof the two optical waveguides into optical signal parts which are thenintroduced respectively into the two optical waveguides; and

a second directional coupler that is connected to the other end of thephase shifter and functions to couple the optical signal parts receivedrespectively from the two optical waveguides,

at least one of the first and second electrodes and the third electrodehaving been extended into a part or the whole of the first directionalcoupler, at least one of the first and second electrodes and the thirdelectrode having been extended into a part or the whole of the seconddirectional coupler.

According to this construction, in addition to the third feature of theinvention, the first, second, and third electrodes in the phase shifterare extended into a part or the whole of both the first directionalcoupler and the second directional coupler. Therefore, upon theapplication of the voltage to the electrodes in the phase shifter, anelectric field is applied to the phase shifter and, at the same time, isalso applied to the first and second directional couplers from theelectrode portion provided in the first and second directional couplers,whereby the refractive index in each of the directional couplers iscontrolled. As a result, since the coupling length L is equivalentlyregulated, the deterioration in extinction ratio can be suppressed.Further, since insulation between the electrodes in the phase shifterand the electrodes in the directional coupler is not required, there isno need to provide a space between these electrodes. This can eliminatethe need to increase the size of the waveguide-type optical controldevice, and, in addition, the complication of the control system can beavoided.

According to the fifth feature of the invention, a waveguide-typeoptical control device comprising:

a phase shifter comprising two left and right optical waveguides, afirst electrode provided on the left side of the left optical waveguide,a second electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides;

a first directional coupler that is connected to one end of the phaseshifter and functions to branch an optical signal introduced through oneof the two optical waveguides into optical signal parts which are thenintroduced respectively into the two optical waveguides; and

a second directional coupler that is connected to the other end of thephase shifter and functions to couple the optical signal parts receivedrespectively from the two optical waveguides,

said first directional coupler comprising, in its directional couplingsection, first directional coupling section outer electrodes disposedrespectively at a portion near the left side of the left opticalwaveguide and at a portion near the right side of the right opticalwaveguide in the first directional coupling section and a firstdirectional coupling section intermediate electrode disposed between thetwo optical waveguides in the first directional coupling section,

said first electrode and said second electrode having been electricallyconnected respectively to the first directional coupling section outerelectrodes, said third electrode having been electrically connected tothe first directional coupling section intermediate electrode.

According to this construction, the first directional coupler usingoptical waveguides common to the first directional coupler and the phaseshifter comprises first directional coupling section outer electrodesdisposed respectively at a portion near the left side of the leftoptical waveguide and at a portion near the right side of the rightoptical waveguide in the first directional coupling section and a firstdirectional coupling section intermediate electrode disposed between thetwo optical waveguides in the first directional coupling section, andthe first, second, and third electrodes in the phase shifter areelectrically connected respectively thereto. Therefore, upon theapplication of the voltage across the electrodes in the phase shifter,an electric field is applied to the phase shifter and, at the same time,is also applied to the first directional coupler, whereby the refractiveindex in the directional coupler is controlled. As a result, since thecoupling length L is equivalently regulated, the deterioration inextinction ratio can be suppressed. Further, since insulation betweenthe electrodes in the phase shifter and the electrodes in thedirectional coupler is not required, there is no need to provide a spacebetween these electrodes. This can eliminate the need to increase thesize of the waveguide-type optical control device, and, in addition, thecomplication of the control system can be avoided.

According to the sixth feature of the invention, a waveguide-typeoptical control device comprises:

a phase shifter comprising two left and right optical waveguides, afirst electrode provided on the left side of the left optical waveguide,a second electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides;

a first directional coupler that is connected to one end of the phaseshifter and functions to branch an optical signal introduced through oneof the two optical waveguides into optical signal parts which are thenintroduced respectively into the two optical waveguides; and

a second directional coupler that is connected to the other end of thephase shifter and functions to couple the optical signal parts receivedrespectively from the two optical waveguides,

said second directional coupler comprising, in its directional couplingsection, second directional coupling section outer electrodes disposedrespectively at a portion near the left side of the left opticalwaveguide and at a portion near the right side of the right opticalwaveguide in the second directional coupling section and a seconddirectional coupling section intermediate electrode disposed between thetwo optical waveguides in the second directional coupling section,

said first electrode and said second electrode having been electricallyconnected respectively to the second directional coupling section outerelectrodes, said third electrode having been electrically connected tothe second directional coupling section intermediate electrode.

According to this construction, the second directional coupler usingoptical waveguides common to the second directional coupler and thephase shifter comprises second directional coupling section outerelectrodes disposed respectively at a portion near the left side of theleft optical waveguide and at a portion near the right side of the rightoptical waveguide in the second directional coupling section and asecond directional coupling section intermediate electrode disposedbetween the two optical waveguides in the second directional couplingsection, and the first, second, and third electrodes in the phaseshifter are electrically connected respectively thereto. Therefore, uponthe application of the voltage across the electrodes in the phaseshifter, an electric field is applied to the phase shifter and, at thesame time, is also applied to the second directional coupler, wherebythe refractive index in the directional coupler is controlled. As aresult, since the coupling length L is equivalently regulated, thedeterioration in extinction ratio can be suppressed. Further, sinceinsulation between the electrodes in the phase shifter and theelectrodes in the directional coupler is not required, there is no needto provide a space between these electrodes. This can eliminate the needto increase the size of the waveguide-type optical control device, and,in addition, the complication of the control system can be avoided.

According to the seventh feature of the invention, a variable opticalattenuator comprises:

a phase shifter provided with a first electrode section comprising anelectrode provided on the left side of a left optical waveguide, anelectrode provided on the right side of a right optical waveguide, andan electrode provided between the two optical waveguides; and

a directional coupler comprising two optical waveguides which areconnected respectively to the two optical waveguides in the phaseshifter and are provided parallel to each other with the spacing betweenthe two optical waveguides being partially reduced, said directionalcoupler being used in at least one of an optical branching sectionprovided on the input side of the phase shifter and an optical couplingsection provided on the output side of the phase shifter, the refractiveindex of the two optical waveguides being varied according to a voltageapplied across the electrodes provided respectively on the left side ofthe left optical waveguide and the right side of the right opticalwaveguide and the electrode provided between the two optical waveguidesin the phase shifter, whereby the attenuation level of the lights passedthrough the optical waveguides is controlled,

said directional coupler being provided with a second electrode sectioncomprising an electrode provided on the left side of the left opticalwaveguide, an electrode provided on the right side of the right opticalwaveguide, and an electrode provided between the two optical waveguides,the three electrodes constituting the second electrode section beingelectrically connected respectively to the three electrodes constitutingthe first electrode section provided adjacent to the second electrodesection in the longitudinal direction of the two optical waveguides, thevoltage applied to the first electrode section being applied to thesecond electrode section.

According to this construction, the directional coupler used in theoptical branching section or the optical coupling section comprises, inits region, a second electrode section having three electrodes, i.e., afirst electrode provided on the left side of the left optical waveguide,a second electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides, and the electrodes in this second electrode section areseparately and electrically connected respectively to three electrodesin the first electrode section in the phase shifter, whereby the voltageapplied to the first electrode section in the phase shifter issimultaneously applied to the electrodes of the second electrode sectionin the directional coupler. By virtue of this construction, therefractive index in the directional coupler is controlled by the voltageapplied to the phase shifter to control the attenuation level of theoptical signals which pass through the optical waveguides. Further,since insulation between the electrodes in the phase shifter and theelectrodes in the directional coupler is not required, there is no needto provide a space between these electrodes. This can eliminate the needto increase the size of the variable optical attenuator, and, inaddition, the complication of the control system (attenuation levelcontrol circuit) can be avoided.

According to the eighth feature of the invention, an optical equalizercomprises:

an optical demultiplexer into which a wavelength multiplexed opticalsignal containing a plurality of optical signals with one or mutuallydifferent wavelengths is input and which demultiplexes the wavelengthmultiplexed optical signal into optical signals and outputs thedemultiplexed optical signals;

the variable optical attenuator according to the seventh feature of theinvention which selectively attenuates the demultiplexed optical signalsby a predetermined attenuation level and outputs the attenuated opticalsignals; and

an optical multiplexer for multiplexing the attenuated optical signalsoutput from the variable optical attenuator.

According to this construction, the optical equalizer comprises anoptical demultiplexer for demultiplexing the input wavelengthmultiplexed optical signal, a variable optical attenuator forattenuating, to a predetermined level, the optical signals output fromthe optical demultiplexer, and an optical multiplexer for multiplexingoptical signals from each variable optical attenuator. As describedabove in connection with the seventh feature of the invention, in thevariable optical attenuator, the electrodes provided in the phaseshifter separately and electrically connected to adjacent electrodes inthe directional coupler. Therefore, upon the application of the voltageto the phase shifter, an electric field can be also applied to thedirectional coupler to control the attenuation level of the opticalsignals which pass through the optical waveguides. This can realizematching of optical signal levels. Thus, since insulation between theelectrodes in the phase shifter and the electrodes in the directionalcoupler is not required, there is no need to provide a space betweenthese electrodes. Further, since a common applied voltage can be used,the size of the variable optical attenuator can be reduced, and thenecessity of increasing the size of the optical equalizer can beavoided.

According to the ninth feature of the invention, an opticalinserting/separating apparatus comprises:

an optical demultiplexer into which a wavelength multiplexed opticalsignal containing a plurality of optical signals with one or mutuallydifferent wavelengths is input and which demultiplexes the wavelengthmultiplexed optical signal into optical signals and outputs thedemultiplexed optical signals;

a wavelength varying filter for selectively separating an optical signalwith a predetermined wavelength from the demultiplexed optical signals;

the variable optical attenuator according to the seventh feature of theinvention which selectively attenuates the demultiplexed opticalsignals, which have passed through the wavelength varying filter, by apredetermined attenuation level and outputs the attenuated opticalsignals; and

a filter which selects and outputs the attenuated optical signals fromthe variable optical attenuator or externally inserted optical signals;and

an optical multiplexer for multiplexing the attenuated optical signalsoutput from the filter or the inserted optical signals.

According to this construction, optical signals with predeterminedwavelengths are selectively separated from the optical signals, whichhave been demultiplexed by the optical demultiplexer, through awavelength varying filter, and the level of the optical signals, whichhave been passed through the filter, is then attenuated to a desiredlevel by the variable optical attenuator. The optical signals from thevariable optical attenuator or externally inserted optical signals areselected by a filter and output. The optical signals from individualfilters are multiplexed in the optical multiplexer, and are output asthe wavelength multiplexed optical signal. In the variable opticalattenuator, the first electrode section in the phase shifter iselectrically connected to the second electrode section in thedirectional coupler. Therefore, a common applied voltage can be used forthe application of a voltage across the electrodes. This can minimizethe space necessary for the arrangement of the electrodes and cansimplify the control system, whereby the size of the variable opticalattenuator can be reduced and, in its turn, the size of the opticalequalizer can be reduced.

According to the tenth feature of the invention, a waveguide-typeoptical control device comprises:

a phase shifter comprising two left and right optical waveguides, afirst electrode provided on the left side of the left optical waveguide,a second electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides;

a first directional coupler that is connected to one end of the phaseshifter and functions to branch an optical signal introduced through oneof the two optical waveguides into optical signal parts which are thenintroduced respectively into the two optical waveguides; and

a second directional coupler that is connected to the other end of thephase shifter and functions to couple the optical signal parts receivedrespectively from the two optical waveguides,

at least one of the first and second electrodes and the third electrodehaving been extended into a part or the whole of the first directionalcoupler or the second directional coupler, the third electrode in itsextended electrode portion being provided so that a longitudinalelectric field is applied to one of the two optical waveguides.

According to this construction, the first, second, and third electrodesin the phase shifter are extended into a part or the whole of the firstdirectional coupler or the second directional coupler using commonoptical waveguides, and, at the same time, the extended portion of thethird electrode in the directional coupler is provided so that alongitudinal electric field is applied to one of the optical waveguides.Therefore, upon the application of the voltage across the electrodes inthe phase shifter, an electric field is applied to the phase shifterand, at the same time, is also applied from the vertical direction(thicknesswise direction of the electrodes) to the first or seconddirectional coupler to control the refractive index. Since thelongitudinal electric field can be applied, in the case of an identicalvoltage, a strong electric field can be applied while, in the case of anidentical electric field, the applied voltage can be lowered. Further,since the coupling length L is equivalently regulated, a deteriorationin extinction ratio can be reduced. Further, since insulation betweenthe electrodes in the phase shifter and the electrodes in thedirectional coupler is not required, there is no need to provide a spacebetween these electrodes. This can eliminate the need to increase thesize of the waveguide-type optical control device, and, in addition, thecomplication of the control system can be avoided.

According to the eleventh feature of the invention, a process forproducing a waveguide-type optical control device, comprises the stepsof:

forming two right and left optical waveguides so as to construct a phaseshifter and at least one directional coupler within a substrate;

forming a first electrode and a second electrode respectively on theleft side of the left optical waveguide and on the right side of theright optical waveguide so as to extend from the phase shifter to a partof the directional coupler, forming a third electrode between the twooptical waveguides so as to extend from the phase shifter to a part ofthe directional coupler, and, in addition, forming a plurality ofindependent electrode pieces at a predetermined interval at the end ofthe second electrode and at the end of the third electrode, or forming aplurality of electrode pieces at a predetermined interval connected toeach other or one another in a cascade form through a fuse; and

successively wire bonding the necessary number of the plurality ofindependent electrode pieces from the inner side, or successively fusioncutting the fuse of the necessary number of the plurality of cascadedelectrode pieces from the outer side so as to bring the characteristicvalue of the directional coupler to a desired value.

According to this production process, after a phase shifter and at leastone directional coupler are formed by two optical waveguides, the first,second, and third electrodes are formed respectively in predeterminedregions of the phase shifter and the directional coupler. In thedirectional coupler, a plurality of electrode pieces are connected in acascade form to the end of the first electrode and the end of the secondelectrode through a fuse or a bonding wire. By virtue of thisconstruction, the length of the first and second electrodes can befinely adjusted. That is, tuning can be performed to provide idealcharacteristics.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be explained in more detail in conjunction with theappended drawings, wherein:

FIG. 1 is a plan view showing the construction of a conventionalwaveguide-type optical control device having a directional coupler-typeMach-Zehnder (MZ) construction;

FIG. 2 is a typical diagram showing the relationship between the gap andthe coupling length in a directional coupler;

FIG. 3 is a diagram showing a difference in characteristics attributableto a difference in production parameter;

FIG. 4 is a plan view showing another conventional waveguide-typeoptical control device;

FIG. 5 is a plan view showing the first preferred embodiment of thewaveguide-type optical control device according to the invention;

FIGS. 6A and 6B are characteristic diagrams showing a change inpropagation constant upon the application of a bias voltage to a firstdirectional coupler, wherein FIG. 6A represents the case where no biasvoltage is applied and 6B represents the case where a bias voltage isapplied;

FIG. 7 is a plan view showing the second preferred embodiment of theinvention;

FIGS. 8A and 8B are characteristic diagrams showing extinction ratiocharacteristics in the waveguide-type optical control device shown inFIG. 7;

FIG. 9 is a plan view showing the third preferred embodiment of theinvention;

FIG. 10 is a plan view showing the fourth preferred embodiment of theinvention;

FIG. 11 is a plan view showing the fifth preferred embodiment of theinvention;

FIG. 12 is a plan view showing the sixth preferred embodiment of theinvention;

FIG. 13 is a characteristic diagram showing extinction ratiocharacteristics in the waveguide-type optical control device shown inFIG. 12;

FIG. 14 is a plan view showing the seventh preferred embodiment of thewaveguide-type optical control device according to the invention;

FIGS. 15A and 15B are characteristic diagrams showing the results of thecomparison of characteristics obtained by the conventional constructionwith characteristics obtained by the construction according to theinvention;

FIGS. 16A and 16B are characteristic diagrams showing a change inpropagation constant upon the application of a bias voltage to a firstdirectional coupler, wherein FIG. 16A represents the case where no biasvoltage is applied and FIG. 16B represents the case where a bias voltageis applied;

FIG. 17 is a plan view showing the eighth preferred embodiment of thewaveguide-type optical control device according to the invention;

FIGS. 18A and 18B are characteristic diagrams showing extinction ratiocharacteristics in the waveguide-type optical control device shown inFIG. 14;

FIG. 19 is a plan view showing the ninth preferred embodiment of thewaveguide-type optical control device according to the invention;

FIG. 20 is a plan view showing the tenth preferred embodiment of thewaveguide-type optical control device according to the invention;

FIG. 21 is a plan view showing the eleventh preferred embodiment of thewaveguide-type optical control device according to the invention;

FIG. 22 is a plan view showing the twelfth preferred embodiment of thewaveguide-type optical control device according to the invention;

FIG. 23 is a characteristic diagram showing extinction ratiocharacteristics in the waveguide-type optical control device shown inFIG. 22;

FIG. 24 is a plan view showing the thirteenth preferred embodiment ofthe waveguide-type optical control device according to the invention;

FIG. 25 is a plan view showing the fourteenth preferred embodiment ofthe waveguide-type optical control device according to the invention;

FIGS. 26A to 26D are cross-sectional views taken on line A—A of FIG. 25,illustrating first to fourth embodiments of the structure of thewaveguide-type optical control device shown in FIG. 25;

FIG. 27 is a block diagram showing the construction of an opticalequalizer apparatus using the waveguide-type optical control deviceaccording to the invention;

FIG. 28 is a block diagram showing the construction of an opticalinserting/separating apparatus to which the waveguide-type opticalcontrol device according to the invention has been applied; and

FIG. 29 is a block diagram showing another construction of an opticalinserting/separating apparatus to which the waveguide-type opticalcontrol device according to the invention has been applied.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Preferred embodiments of the invention will be explained in conjunctionwith the accompanying drawings.

First Preferred Embodiment

FIG. 5 shows the first preferred embodiment of the waveguide-typeoptical control device according to the invention. Each of preferredembodiments described later will be explained by taking a variableoptical attenuator as a waveguide-type optical control device.

In the waveguide-type optical control device shown in FIG. 5, a firstdirectional coupler 2, a phase shifter 3 (a control unit), and a seconddirectional coupler 4 are disposed in series on an LN substrate (notshown), and optical waveguides 1 a, 1 b are provided parallel to eachother so as to go through these elements. In positions of the firstdirectional coupler 2 and the second directional coupler 4, spacingbetween the optical waveguides 1 a, 1 b is narrowed so as to form thedirectional couplers. Further, a first electrode 51, a second electrode52, and a third electrode 53 are provided on the LN substrate so as toextend over the first directional coupler 2, the phase shifter 3, andthe second directional coupler 4. Specifically, the first electrode 51is provided on the outside of the optical waveguide 1 a, the secondelectrode 52 is provided on the outside of the optical waveguide 1 b,and the third electrode 53 is provided between the optical waveguides 1a and 1 b. In other words, this construction is such that the firstelectrode 3 a, the second electrode 3 b, and the third electrode 3 c inthe conventional construction shown in FIG. 1 have been extended intothe first directional coupler 2 and the second directional coupler 4.

A bias voltage 54 is applied by a direct current power supply 55 acrossthe first electrode 51 and the third electrode 53 and across the secondelectrode 52 and the third electrode 53. A positive (+) voltage isapplied to the first electrode 51 and the second electrode 52, and anegative (−) voltage is applied to the third electrode 53.

The operation of the first preferred embodiment of the invention will beexplained.

An optical signal introduced through the input terminal of the opticalwaveguide 1 a is branched in the first directional coupler 2 into anoptical signal part to be traveled through the optical waveguide 1 a andan optical signal part to be traveled through the optical waveguide 1 bin a branching ratio (rate) of 50:50 (50%), and these branched opticalsignals are then input into the phase shifter 3. The phase shifter 3operates according to the bias voltage 54 applied to the first electrode51 and the second electrode 52. Specifically, when the bias voltage 54is not applied, the two branched optical signal parts respectively forthe optical waveguide 1 a and the optical waveguide 1 b are then inputin an identical phase into the second directional coupler 4, and thewhole input light is output from the output terminal of the opticalwaveguide 1 b. When the bias voltage 54 is increased from 0 V to acertain voltage, the refractive index of the optical waveguides 1 a and1 b is changed and, consequently, the propagation speed of the opticalsignals, which travel respectively through the optical waveguides 1 aand 1 b, is changed.

Since the bias voltage 54 applied to the optical waveguide 1 a isopposite in direction to the bias voltage applied to the opticalwaveguide 1 b, a difference occurs in propagation speed between theoptical signal, which travels through the optical waveguide 1 a, and theoptical signal which travels through the optical waveguide 1 b in thephase shifter 3. As a result, the optical signal in the opticalwaveguide 1 a and the optical signal in the optical waveguide 1 b areinput in a mutually different phase into the second directional coupler4. For this reason, the branching ratio (coupling rate) of the seconddirectional coupler 4 is deviated from the original ratio (rate) 50:50(50%), and, as a result, a part of the optical signal, which, up to thisstage, has been output only from the output terminal of the opticalwaveguide 1 b in the second directional coupler 4, is also output fromthe optical waveguide 1 a. When the bias voltage 54 is increased toabout 30 to 50 V, the optical signal is substantially entirely outputfrom the optical waveguide 1 a. In this way, setting the bias voltage 54to a suitable value can provide a desired optical attenuation level.

As described above in connection with the prior art, when the biasvoltage 54 was not applied, or when a voltage of about 30 to 50 V wasapplied, in order to output the whole optical signal from either theoptical waveguide 1 a or the optical waveguide 1 b in the seconddirectional coupler 4, the length of the portion, where the opticalwaveguides 1 a and 1 b approach each other, should be accurately broughtto the half of the complete coupling length to accurately bring thebranching ratio (coupling rate) of the first directional coupler 2 tothe second directional coupler 4 to 50:50 (50%). The deviation of thebranching ratio (coupling rate) of the first directional coupler 2 tothe second directional coupler 4 from 50:50 (50%) results in increasedleakage of the optical signal from one waveguide to the other waveguideat the output terminal of the second directional coupler 4 and thusdeteriorates the ratio of the minimum attenuation level to the maximumattenuation level (extinction ratio).

On the other hand, according to the invention, the coupling length canbe equivalently regulated by virtue of the construction such that threeelectrodes are provided so as to extend over the first directionalcoupler 2, the phase shifter 3, and the second directional coupler 4,and an electric field is also applied to the first directional coupler 2and the second directional coupler 4, whereby the propagation constantsrespectively in the directional couplers 2, 4 can be regulated.

Specifically, in the first directional coupler 2 in its portion wherethe optical waveguides 1 a and 1 b approach each other, a voltage isapplied to the optical waveguides 1 a, 1 b in such a manner that thedirection of the voltage applied to the optical waveguide 1 a isopposite to the direction of the voltage applied to the opticalwaveguide 1 b, whereby a difference in propagation speed occurs betweenoptical signals which propagate through the first directional coupler 2.Thus, propagation constants (βa, βb) of the optical waveguides 1 a and 1b can be equivalently varied.

FIGS. 6A and 6B show a change in propagation constant upon theapplication of a bias voltage 54 to the first directional coupler 2,wherein FIG. 6A represents the case where no bias voltage 54 is appliedand FIG. 6B represents the case where a bias voltage 54 is applied.

As shown in FIG. 6A, when no bias voltage is applied across the firstand second electrodes 51, 52 and the third electrode 53, the propagationconstants of the optical waveguides 1 a and 1 b in the directionalcoupler are βa and βb, respectively. Upon the application of a biasvoltage to the electrodes, as shown in FIG. 6B, the propagationconstants of the optical waveguides 1 a and 1 b in the directionalcoupler are changed to (βa−Δβ) and (βb+Δβ), respectively. As a result,the coupling length L is brought to (L−ΔL). Thus, the coupling length ofthe first directional coupler 2 is equivalently regulated.

In FIGS. 6A and 6B, explanation has been made on the first directionalcoupler 2. However, it is needless to say that this is true of thesecond directional coupler 4. The regulation of the coupling length ofthe directional couplers in this way permits the branching ratio(coupling rate) to be accurately brought to 50:50 (50%). Since thevoltage applied to the first directional coupler 2 (or seconddirectional coupler 4) is identical to the voltage applied to the phaseshifter 3, optimization is not done over the whole dynamic range in theoptical variable attenuator according to the invention. However, thepresent inventors have confirmed that a ratio of the minimum attenuationlevel to the maximum attenuation level (extinction ratio), which issatisfactory for practical use, can be ensured in an actually usedregion (bias voltage 54=0 (zero) to about 50 V).

For the waveguide-type optical control device (variable opticalattenuator) having the above construction, since the coupling length canbe equivalently regulated, the deterioration in the extinction ratio canbe reduced. Further, since three electrodes in total suffice forconstituting the device, unlike the conventional construction shown inFIG. 2, increasing the size of the device is not required, and, thus,the complication of the control system can be avoided.

Second Preferred Embodiment

FIG. 7 shows the second preferred embodiment of the invention.

The construction of this second preferred embodiment is identical tothat of the first preferred embodiment of the invention in that thefirst electrode 51, the second electrode 52, and the third electrode 53are provided. The difference between the first and second preferredembodiments is that the position of each of the electrodes has beenoffset in a direction orthogonal to the optical waveguides 1 a, 1 b (aright or left direction in the drawing). In FIG. 7, the electrodes havebeen shifted toward a direction indicated by an arrow (on the opticalwaveguide 1 b side). This arrangement can provide the same effect as thearrangement in the first preferred embodiment of the invention. As aresult, there is no need to closely position the electrodes 51 to 53relative to the optical waveguides 1 a, 1 b. This can reduce thevariation in products.

FIGS. 8A and 8B show extinction ratio (ratio of the minimum attenuationlevel to the maximum attenuation level) characteristics in the variableoptical attenuator shown in FIG. 7, wherein FIG. 8A represents the casewhere each electrode has been offset in the right direction and FIG. 8Brepresents the case where each electrode has been offset in the leftdirection. Thus, the output state of the optical power can be varied asdesired by offsetting the electrodes in either the right direction orthe left direction.

As is apparent from FIG. 8, a ratio of the minimum attenuation level tothe maximum attenuation level (extinction ratio), which is satisfactoryfor practical use, can be ensured in an actually used region (appliedvoltage (bias voltage 54)=0 (zero) to about 50 V).

Third Preferred Embodiment

FIG. 9 shows the third preferred embodiment of the invention.

This preferred embodiment is characterized in that the shape of thefirst electrode 51 is different from that of the second electrode 52.Specifically, the construction of the third preferred embodiment of theinvention is such that the first electrode 51 and the second electrode52 are provided so as to be asymmetrical in terms of length about acenter line 256 between the optical waveguides 1 a, 1 b (the length ofthe second electrode 52 is smaller than that of the first electrode 51)and a bias voltage 54 is applied across the first and second electrodes51, 52 and the third electrode 53. In this preferred embodiment, thepropagation constant can be changed from βb to βb′ by regulating thelength of the second electrode 52. By virtue of this, the propagationconstant β of the optical waveguide 1 a can be made different from thatof the optical waveguide 1 b. Therefore, in the case of a variableoptical attenuator, the optical level attenuation value of the opticalwaveguide 1 a and the optical level attenuation value of the opticalwaveguide 1 b can be controlled so as to be different from each other.

Fourth Preferred Embodiment

FIG. 10 shows the fourth preferred embodiment of the invention.

This preferred embodiment is also characterized in that shape of thefirst electrode 51 is different from that of the second electrode 52.Specifically, the length of the second electrode 52 is equal to thelength of the straight portion of the optical waveguide 1 b in the phaseshifter 3, and the whole second electrode 52 is quadrangular. Also inthis case, the bias voltage 54 is applied across the first and secondelectrodes 51, 52 and the third electrode 53.

In the case of the preferred embodiment shown in FIG. 10, the secondelectrode 52 does not extend to the first directional coupler 2 and thesecond directional coupler 4 in the optical waveguide 1 b. Therefore,with respect to the optical waveguide 1 b portion, the arrangement ofthe electrode is the same as that of the electrode in the opticalwaveguide 1 b in the conventional device shown in FIG. 1. That is,according to this preferred embodiment, the three electrodes 51 to 53can be made effective only for the optical waveguide 1 a, and anyelectric field is not applied to the optical waveguide 1 b in thedirectional couplers 2, 4. This construction is advantageous when animprovement in the extinction ratio in only one of the opticalwaveguides 1 a and 1 b is desired. Further, according to thisconstruction, since the electrode size in any one of the opticalwaveguides 1 a and 1 b can be reduced, the area occupied by thewaveguide-type optical control device can be reduced.

Fifth Preferred Embodiment

FIG. 11 shows the fifth preferred embodiment of the invention.

This preferred embodiment is different from the above preferredembodiments in that the length of each electrode is somewhat larger thanthe length of the phase shifter 3. That is, the end of each electrode issomewhat extended into the first directional coupler 2 and the seconddirectional coupler 4. In this case, the bias voltage 54 is applied bythe same manner as used in each of the above preferred embodiments.

According to this preferred embodiment, as compared with the firstpreferred embodiment, the ability to regulate the coupling rate issomewhat inferior. Since, however, the area of the electrode can bereduced, the size of the waveguide-type optical control device can bereduced.

Sixth Preferred Embodiment

FIG. 12 shows the sixth preferred embodiment.

This preferred embodiment is a variant of the preferred embodiment shownin FIG. 11. That is, the construction of the sixth preferred embodimentis such that the construction shown in FIG. 7 has been added to theconstruction shown in FIG. 11. More specifically, in the construction ofthe sixth preferred embodiment, the first electrode 51, the secondelectrode 52, and the third electrode 53 have been offset with respectto the center line 256 between the optical waveguides 1 a, 1 b. In FIG.12, the first electrode 51, the second electrode 52, and the thirdelectrode 53 have been shifted or offset in the right direction in thedrawing. In this preferred embodiment, the bias voltage 54 is applied toeach electrode in the same manner as described above in connection withthe preferred embodiment shown in FIG. 11. This construction has boththe feature of the preferred embodiment shown in FIG. 11 and the featureof the preferred embodiment shown in FIG. 7. Therefore, the freedom ofthe arrangement of the electrode is high, and, in addition, the area ofthe electrode can be made small, contributing to a reduction in size ofthe waveguide-type optical control device.

FIG. 13 shows extinction ratio (ratio of the minimum attenuation levelto the maximum attenuation level) characteristics in the preferredembodiment shown in FIG. 12 wherein the three electrodes have beensimultaneously offset in the right or left direction from the centerbetween the two waveguides. As is apparent from FIG. 13, the obtainedratio of the minimum attenuation level to the maximum attenuation level(extinction ratio) is satisfactory for practical use.

Seventh Preferred Embodiment

FIG. 14 shows the seventh preferred embodiment of the waveguide-typeoptical control device according to the invention.

In this preferred embodiment, a first directional coupler 12, a phaseshifter 13 (a phase shifter), and a second directional coupler 14 arearranged in series on an LN substrate (not shown), and opticalwaveguides 11 a, 11 b are provided parallel to each other so as to gothrough these elements. In positions of the first directional coupler 12and the second directional coupler 14, spacing between the opticalwaveguides 11 a, 11 b is narrowed so as to form the directional coupler.Further, a first electrode 151, a second electrode 152, and a thirdelectrode 153 are provided on the LN substrate so as to extend over thefirst directional coupler 12, the phase shifter 13, and the seconddirectional coupler 14.

Specifically, the first electrode 151 is provided on the outside of theoptical waveguide 11 a, the second electrode 152 is provided on theoutside of the optical waveguide 11 b, and the third electrode 153 isprovided between the optical waveguides 11 a and 11 b. In other words,this construction is such that the first electrode 3 a, the secondelectrode 3 b, and the third electrode 3 c in the conventionalconstruction shown in FIG. 1 have been extended into the firstdirectional coupler 2 and the second directional coupler 4. A biasvoltage 154 is applied by a direct current power supply 155 across thefirst and second electrodes 151, 152 and the third electrode 153. Apositive (+) voltage is applied to the first electrode 151 and thesecond electrode 152, and a negative (−) voltage is applied to the thirdelectrode 153.

In the construction shown in FIG. 14, a combination of three electrodesof the first electrode 151, the second electrode 152, and the thirdelectrode 153 provided in the phase shifter 13 constitutes a firstelectrode section, a combination of three electrodes of the firstelectrode 151, the second electrode 152, and the third electrode 153provided in the first directional coupler 12 constitutes a secondelectrode section, and a combination of three electrodes of the firstelectrode 151, the second electrode 152, and the third electrode 153provided in the second directional coupler 14 constitutes a thirdelectrode section.

The operation of the seventh preferred embodiment of the invention willbe explained.

An optical signal introduced through the input terminal of the opticalwaveguide 11 a is branched in the first directional coupler 12 into anoptical signal part to be traveled through the optical waveguide 11 aand an optical signal part to be traveled through the optical waveguide11 b in a branching ratio (rate) of 50:50 (50%), and these branchedoptical signals are then input into the phase shifter 13. The phaseshifter 13 operates according to the bias voltage 154 applied to thefirst electrode 151 and the second electrode 152. Specifically, when thebias voltage 154 is not applied, the two branched optical signal partsrespectively for the optical waveguide 11 a and the optical waveguide 11b are then input in an identical phase into the second directionalcoupler 14, and the whole input light is output from the output terminalof the optical waveguide 11 b. When the bias voltage 154 is increasedfrom 0 (zero) V to a certain voltage, the refractive index of theoptical waveguides 11 a and 11 b is changed and, consequently, thepropagation speed of the optical signals, which travel respectivelythrough the optical waveguides 11 a and 11 b, is changed.

Since the bias voltage 154 applied to the optical waveguide 11 a isopposite in direction to the bias voltage applied to the opticalwaveguide 11 b, a difference occurs in propagation speed between theoptical signal, which travels through the optical waveguide 11 a, andthe optical signal which travels through the optical waveguide 11 b inthe phase shifter 13. As a result, the optical signal in the opticalwaveguide 11 a and the optical signal in the optical waveguide 11 b areinput in a mutually different phase into the second directional coupler14. For this reason, the branching ratio (coupling rate) of the seconddirectional coupler 14 is deviated from the original ratio (rate) 50:50(50%), and, as a result, a part of the optical signal, which, up to thisstage, has been output only from the output terminal of the opticalwaveguide 11 b in the second directional coupler 14, is also output fromthe optical waveguide 11 a. When the bias voltage 154 is increased toabout 30 to 50 V, the optical signal is substantially entirely outputfrom the optical waveguide 11 a. In this way, an optical output signalbrought to a desired optical attenuation level can be obtained bysetting the bias voltage 154 to a suitable value.

As described above in connection with the prior art, when the biasvoltage 154 was not applied, or when a high voltage of about 30 to 50 Vwas applied, in order to output the whole optical signal from either theoptical waveguide 11 a or the optical waveguide 11 b in the seconddirectional coupler 14, the length of the portion, where the opticalwaveguides 11 a and 11 b in the directional coupler approach each other,i.e., coupling length L, should be accurately brought to the half of thecomplete coupling length Lc to accurately bring the branching ratio(coupling rate) of the first directional coupler 12 to the seconddirectional coupler 14 to 50:50 (50%). The deviation of the branchingratio (coupling rate) of the first directional coupler 12 to the seconddirectional coupler 14 from 50:50 (50%) results in increased leakage ofthe optical signal from one waveguide to the other waveguide at theoutput terminal of the second directional coupler 14 and thusdeteriorates the ratio of the minimum attenuation level to the maximumattenuation level (extinction ratio).

On the other hand, according to the present preferred embodiment whereinthe electrode section comprising three electrodes has also been providedin the first directional coupler 12 and the second directional coupler14, an electric field is also applied to the optical waveguides withinthese directional couplers and, thus, the propagation constants of therespective directional couplers 12, 14 can be regulated. By virtue ofthis, the coupling length L is equivalently regulated. Specifically, inthe first directional coupler 12 in its portion where the opticalwaveguides 11 a and 11 b approach each other, a voltage is applied tothe optical waveguides 11 a, 11 b in such a manner that the direction ofthe voltage applied to the optical waveguide 11 a is opposite to thedirection of the voltage applied to the optical waveguide 11 b, wherebya difference in propagation speed occurs between optical signals whichpropagate through the first directional coupler 12. Thus, propagationconstants (βa, βb) of the optical waveguides 11 a and 11 b can beequivalently varied.

FIGS. 15A and 15B show the results of the comparison of thecharacteristics obtained by the conventional construction with thecharacteristics obtained by the construction of this preferredembodiment of the invention.

FIG. 15A shows characteristics obtained by the construction of theconventional waveguide-type optical control device shown in FIG. 1, andFIG. 15B shows characteristics obtained by the construction of thewaveguide-type optical control device, shown in FIG. 14, according tothe seventh preferred embodiment of the invention. As can be seen fromFIG. 15A showing the characteristics of the conventional construction,the maximum attenuation level (=insertion loss) is 13 dB at the highest.By contrast, as can be seen from FIG. 15B showing the characteristics ofthe construction according to the seventh preferred embodiment of theinvention, when the voltage applied to the electrode is in the range of0 (zero) to several tens of volts, the maximum attenuation level reaches20 dB. This indicates that the characteristics have been significantlyimproved.

FIGS. 16A and 16B show a change in propagation constant upon theapplication of a bias voltage 154 to the first directional coupler 12,wherein FIG. 16A represents the case where no bias voltage 154 isapplied and FIG. 16B represents the case where a bias voltage 154 isapplied.

As shown in FIG. 16A, when no bias voltage is applied across the firstand second electrodes 151, 152 and the third electrode 153, thepropagation constants of the optical waveguides 11 a and 11 b in thedirectional coupler are βa and βb, respectively. Upon the application ofa bias voltage to the electrodes, as shown in FIG. 16B, the propagationconstants of the optical waveguides 11 a and 11 b in the directionalcoupler are changed to (βa−Δβ) and (βb+Δβ), respectively. As a result,the coupling length L is brought to (L−ΔL). Thus, the coupling length Lof the first directional coupler 12 is equivalently regulated.

In FIGS. 16A and 16B, explanation has been made on the first directionalcoupler 12. However, it is needless to say that this is true of thesecond directional coupler 14. The regulation of the coupling length Lof the directional couplers in this way permits the branching ratio(coupling rate) to be accurately brought to 50:50 (50%). Since thevoltage applied to the first directional coupler 12 (or seconddirectional coupler 14) is identical to the voltage applied to the phaseshifter 13, optimization is not done over the whole dynamic range in theoptical variable attenuator according to the invention. However, thepresent inventors have confirmed that a ratio of the minimum attenuationlevel to the maximum attenuation level (extinction ratio), which issatisfactory for practical use, can be ensured in an actually usedregion (bias voltage 154=0 (zero) to about 50 V).

For the waveguide-type optical control device having the aboveconstruction, since the coupling length L can be equivalently regulated,the deterioration in the extinction ratio can be reduced. Further, sincethree electrodes in total suffice for constituting the device, unlikethe conventional construction shown in FIG. 1, increasing the size ofthe device is not required, and, thus, the complication of the controlsystem can be avoided.

Eighth Preferred Embodiment

FIG. 17 shows the eighth preferred embodiment of the invention.

The construction of this eighth preferred embodiment is identical tothat of the seventh preferred embodiment of the invention in that thefirst electrode 151, the second electrode 152, and the third electrode153 are provided. The difference between the seventh and eighthpreferred embodiments is that the position of each of the electrodes hasbeen offset in a direction orthogonal to the optical waveguides 11 a, 11b (the right or left direction in the drawing). In FIG. 17, theelectrodes have been shifted toward a direction indicated by an arrow(on the optical waveguide 11 b side). This arrangement can provide thesame effect as the arrangement in the seventh preferred embodiment ofthe invention. As a result, there is no need to closely position theelectrodes 151 to 153 relative to the optical waveguides 11 a, 11 b.This can reduce the variation in products and, at the same time, canimprove the yield.

FIGS. 18A and 18B show extinction ratio characteristics in the variableoptical attenuator shown in FIG. 17, wherein FIG. 18A represents thecase where each electrode has been offset in the right direction andFIG. 18B represents the case where each electrode has been offset in theleft direction. Thus, the output state of the optical power can bevaried as desired by offsetting the electrodes in either the rightdirection or the left direction. As is apparent from FIGS. 18A and 18B,a ratio of the minimum attenuation level to the maximum attenuationlevel (extinction ratio), which is satisfactory for practical use, canbe ensured in an actually used region (applied voltage (bias voltage154)=0 (zero) to about ±50 V). The comparison of the characteristicsshown in FIG. 18A with the characteristics shown in FIG. 18B shows that,when the applied voltage is in the range of 0 (zero) to +50 V, thecharacteristics shown in FIG. 18A are suitable, while, when the appliedvoltage is in the range of 0 (zero) to −50V, the characteristics shownin FIG. 18B are suitable.

Ninth Preferred Embodiment

FIG. 19 shows the ninth preferred embodiment of the invention.

This preferred embodiment is characterized in that the shape of thefirst electrode 151 is different from that of the second electrode 152.Specifically, the construction of the ninth preferred embodiment of theinvention is such that the first electrode 151 and the second electrode152 are provided so as to be asymmetrical in terms of length about acenter line 256 between the optical waveguides 11 a, 11 b (the length ofthe second electrode 152 is smaller than that of the first electrode151) and a bias voltage 154 is applied across the first and secondelectrodes 151, 152 and the third electrode 153. In this preferredembodiment, the propagation constant can be changed from βb to βb′ byregulating the length of the second electrode 152. By virtue of this,the propagation constant β of the optical waveguide 11 a can be madedifferent from that of the optical waveguide 11 b. Therefore, in thecase of a variable optical attenuator, the optical level attenuationvalue of the optical waveguide 11 a and the optical level attenuationvalue of the optical waveguide 11 b can be controlled so as to bedifferent from each other.

Tenth Preferred Embodiment

FIG. 20 shows the tenth preferred embodiment of the invention.

This preferred embodiment is also characterized in that the shape of thefirst electrode 151 is different from that of the second electrode 152.Specifically, the length of the second electrode 152 is equal to thelength of the straight portion of the optical waveguide 11 b in thephase shifter 13, and the whole second electrode 152 is quadrangular.Also in this case, the bias voltage 154 is applied across the first andsecond electrodes 151, 152 and the third electrode 153.

In the case of the preferred embodiment shown in FIG. 20, the secondelectrode 152 does not extend to the first directional coupler 12 andthe second directional coupler 14 in the optical waveguide 11 b.Therefore, with respect to the optical waveguide 11 b portion, thearrangement of the electrode is the same as that of the electrode in theoptical waveguide 1 b in the conventional device shown in FIG. 1. Thatis, according to this preferred embodiment, the three electrodes 151 to153 can be made effective only for the optical waveguide 11 a, and anyelectric field is not applied to the optical waveguide 11 b in thedirectional couplers 12, 14. This construction is advantageous when animprovement in the extinction ratio in only one of the opticalwaveguides 11 a and 11 b is desired. Further, according to thisconstruction, since the electrode size in any one of the opticalwaveguides 11 a and 11 b can be reduced, the area occupied by thewaveguide-type optical control device can be reduced.

Eleventh Preferred Embodiment

FIG. 21 shows the eleventh preferred embodiment of the invention.

This preferred embodiment is different from the above preferredembodiments in that the length of each electrode is somewhat larger thanthe length of the phase shifter 13. That is, the end of each electrodeis somewhat extended into the first directional coupler 12 and thesecond directional coupler 14. In this case, the bias voltage 154 isapplied by the same manner as used in each of the above preferredembodiments.

According to this preferred embodiment, as compared with the seventhpreferred embodiment, the ability to regulate the coupling rate issomewhat inferior. Since, however, the area of the electrode can bereduced, the size of the waveguide-type optical control device can bereduced.

Twelfth Preferred Embodiment

FIG. 22 shows the twelfth preferred embodiment of the invention.

This preferred embodiment is a variant of the preferred embodiment shownin FIG. 21. That is, the construction of the twelfth preferredembodiment is such that the construction shown in FIG. 17 has been addedto the construction shown in FIG. 21. More specifically, in theconstruction of the twelfth preferred embodiment, the first electrode151, the second electrode 152, and the third electrode 153 have beenoffset with respect to the center line 256 between the opticalwaveguides 11 a, 11 b. In FIG. 22, the first electrode 151, the secondelectrode 152, and the third electrode 153 have been shifted or offsetin the right direction in the drawing. In this preferred embodiment, thebias voltage 154 is applied to each electrode in the same manner asdescribed above in connection with the preferred embodiment shown inFIG. 21. This construction has both the feature of the preferredembodiment shown in FIG. 21 and the feature of the preferred embodimentshown in FIG. 17. Therefore, the freedom of the arrangement of theelectrode is high, and, in addition, the area of the electrode can bemade small, contributing to a reduction in size of the waveguide-typeoptical control device.

FIG. 23 shows extinction ratio (ratio of the minimum attenuation levelto the maximum attenuation level) characteristics in the preferredembodiment shown in FIG. 22 wherein the three electrodes have beensimultaneously offset in the right or left direction from the centerbetween the two waveguides. As is apparent from FIG. 23, the obtainedratio of the minimum attenuation level to the maximum attenuation level(extinction ratio) is satisfactory for practical use.

Thirteenth Preferred Embodiment

FIG. 24 shows the thirteenth preferred embodiment of the invention.

The construction of this preferred embodiment is the same as that of theseventh preferred embodiment of the invention shown in FIG. 14, exceptthat both ends of the first electrode 151 are split into a plurality ofelectrode pieces 151 a, 151 b, 151 e, 151 d with the remaining electrodeportion serving as a main electrode 151 c and, likewise, both ends ofthe second electrode 152 are split into a plurality of electrode pieces152 a, 152 b, 152 d, 152 e with the remaining electrode portion servingas a main electrode 152 c. In each of the directional couplers, thenecessary number of electrode pieces are electrically cascaded. In FIG.24, the main electrode 151 c is connected to the electrode pieces 151 a,151 b, 151 e, 151 d in a cascade form by bonding wires 16 a, 16 b, andthe main electrode 152 c is connected to the electrode pieces 152 a, 152b, 152 d, 152 e in a cascade form by bonding wires 17 a, 17 b. Thisconstruction can realize fine adjustment of the length of the firstelectrode 151 and the second electrode 152 in the directional couplers,and, thus, tuning can be carried out so as to provide idealcharacteristics.

In the construction shown in FIG. 24, a bonding wire has been used tomutually connect the electrode pieces and to connect the electrodepieces to the main electrode. Alternatively, a construction may beadopted wherein the mutual connection of electrode pieces and theconnection of the electrodes to the main electrode are previouslyperformed through a fine wire, which functions as a fuse, and, ifnecessary, the fuse is fusion cut, for example, by a laser beam toreduce the number of connections of electrode pieces to the necessarynumber of connections. This fusion cutting is started from the fuse inthe outer electrode piece.

Fourteenth Preferred Embodiment

FIG. 25 shows the fourteenth preferred embodiment of the invention. Theconstruction shown in FIG. 25 is the same as the construction shown inFIG. 14, except that the third electrode 153 is disposed on the opticalwaveguide 11 b and the third electrode 153 and the optical waveguide 11a are partially or entirely overlapped in the thicknesswise direction(vertical direction) so that a longitudinal electric field is applied tothe optical waveguide. In this preferred embodiment, the third electrode153 has been provided on the optical waveguide 11 b. Alternatively, thethird electrode 153 may be provided on the optical waveguide 11 a side.According to the construction shown in FIG. 25, since the distancebetween the optical waveguide 11 b and the third electrode 153 isreduced, the electric field at the time of the application of a voltagecan be enhanced and, thus, the sensitivity can be enhanced.

FIGS. 26A to 26D are cross-sectional views taken on line A—A of FIG. 25,illustrating first to fourth embodiments of the structure of thewaveguide-type optical control device shown in FIG. 25. In FIGS. 26A to26D, the cross-section of the first directional coupler 12 is shown.This, however, is true of the second directional coupler 14. FIG. 26Ashows the first embodiment of the structure, wherein optical waveguides11 a, 11 b are provided near the surface of an LiNbO₃ (lithium niobate:LN) substrate 156 and a first electrode 151, a second electrode 152, anda third electrode 153 are then provided on the surface of the LiNbO₃substrate 156 and the optical waveguide 11 b. This construction canadvantageously reduce the thickness of the directional coupler, but onthe other hand, since light is likely to be absorbed, an increase ininsertion loss is unavoidable.

FIG. 26B shows the second embodiment of the structure. In thisstructure, optical waveguides 11 a, 11 b are provided near the surfaceof an LiNbO₃ substrate 156, and a buffer layer 157 formed of adielectric film (oxide film: SiO₂, ITO: indium tin oxide or the like) ora semiconductor film (Si or the like) is then provided on the surface ofthe LiNbO₃ substrate 156 and the optical waveguide 11 b. Further, afirst electrode 151, a second electrode 152, and a third electrode 153are provided on the surface of the buffer layer 157 so that thearrangement is as shown in FIG. 25 as viewed from above. By virtue ofthe provision of the buffer layer 157, as compared with the structureshown in FIG. 26A, the structure shown in FIG. 26B can suppress theabsorption of light, and, thus, the insertion loss can be reduced.

FIG. 26C shows the third embodiment of the structure, TO wherein opticalwaveguides 11 a, 11 b are provided near the surface of the LiNbO₃substrate 156 and a first electrode 151, a second electrode 152, and athird electrode 153 are provided on the backside of the LiNbO₃ substrate156. In this case, the three electrodes are provided at respectivepositions on which the arrangement of the electrodes in the secondembodiment of the structure has been reflected. In this structure, thespacing (distance) between the optical waveguides 11 a, 11 b and eachelectrode, that is, the sensitivity or the like, can be freely setaccording to the thickness of the LiNbO₃ substrate 156.

FIG. 26D shows the fourth embodiment of the structure. In thisstructure, optical waveguides 11 a, 11 b are provided at respectivepredetermined positions near the surface of the LiNbO₃ substrate 156,and grooves 158 are then provided, for example, by etching at siteswhere a first electrode 151, a second electrode 152, and a thirdelectrode 153 are to be provided. In this case, since the thirdelectrode 153 cannot be embedded in the optical waveguide 11 b, thegroove for the third electrode 153 is provided at a site adjacent to theoptical waveguide 11 b. The first electrode 151, the second electrode152, and the third electrode 153 are provided within the grooves 158. Inthis construction, each electrode is formed so as to be coplanar withthe optical waveguides 11 a, 11 b. In the production of the device, amethod may be adopted which comprises the steps of: first forming thegrooves 158; provided each electrode; and then providing the opticalwaveguides 11 a, 11 b. Alternatively, a method may be adopted whichcomprises the steps of: first providing the grooves 158; providing theoptical waveguides 11 a, 11 b; and then providing the electrodes.

The above-described four embodiments of the structure shown in FIGS. 26Ato 26D are different from one another, for example, in only theposition, arrangement, or shape of the electrodes, and these structurescan also be applied to the above other preferred embodiments.

Fifteenth Preferred Embodiment

FIG. 27 shows the construction of an optical equalizer using thewaveguide-type optical control device according to the invention.

This optical equalizer is provided at a position between both ends of anoptical transmission line, and comprises: a demultiplexer 1101 as anoptical demultiplexer for demultiplexing an input light into a pluralityof optical signals with different wavelengths; a plurality of variableoptical attenuators 1100 for regulating the attenuation level of eachoutput light for matching the level; a multiplexer 1102 as an opticalmultiplexer for multiplexing optical signals respectively from thevariable optical attenuators 1100; and an attenuation level controlcircuit 1110 for controlling the attenuation level of the variableoptical attenuator 1100. The waveguide-type optical control devicesaccording to the above preferred embodiments are used as the variableoptical attenuator 1100. The optical waveguide 11 a shown in FIG. 14 isconnected to the demultiplexer 1101, and the optical waveguide 11 b isconnected to the multiplexer 1102. The direct current power supply shownin FIG. 14 and a voltage varying circuit for varying the output voltagethereof are provided in the attenuation level control circuit 1110. Theattenuation levels of the optical signals demultiplexed by thedemultiplexer 1101 can be matched by regulating the attenuation levelsof the optical signals through the variable optical attenuator 1100 andthe attenuation level control circuit 1110. As described above, in thewaveguide-type optical control device (variable optical attenuator 1100)according to the invention, the size can be reduced. Therefore, in theconstruction shown in FIG. 27, the combination of the device with thedemultiplexer 1101 and the multiplexer 1102 does not increase the sizeof the optical equalizer.

Further, the attenuation level control circuit 1110 can perform controlin such a manner that the levels of the optical signals to be outputrespectively from the variable optical attenuators 1100 provide a presetlevel difference. The wavelength dependency of the gain of the opticalamplifier and the wavelength dependency of the transmission line losscan be improved, for example, by presetting the optical level differenceby taking into consideration the wavelength dependency of the gain ofthe optical amplifier and the wavelength dependency of the transmissionline loss.

Sixteenth Preferred Embodiment

FIG. 28 shows the construction of an optical inserting/separatingapparatus to which the waveguide-type optical control device accordingto the invention has been applied.

This optical inserting/separating apparatus is provided at a positionbetween both ends of an optical transmission line which has been laid bya certain distance. Multiplexed optical signal to be input into ademultiplexer 1101 as an optical demultiplexer is amplified by anoptical amplifier (not shown), and is then demultiplexed by ademultiplexer 1101 into a plurality of signals. Each of thedemultiplexed signals is dropped (i.e., is removed to the exterior) oris sent to the output side without drop according to switching of a 1×2optical switch 1103. For the optical signal sent to the output side, theoptical attenuation level is regulated by the variable opticalattenuator 1100 and the attenuation level control circuit 1110 to renderthe output levels for the respective channels uniform. Thewaveguide-type optical control device described in each preferredembodiment may be used in the variable optical attenuator 1100. Theoptical signals respectively from the variable optical attenuators 1100are multiplexed by a multiplexer 1102 as an optical multiplexer into amultiplexed light which is then output to the optical transmission line.When the 2×1 optical switch 1104 has been switched to the Add side, theoptical information, which has been introduced through the Add end, isinput into a 2×1 optical switch 1104 and is added to the multiplexedoptical signal received from the demultiplexer 1101. Also in thisoptical inserting/separating apparatus, the use of the waveguide-typeoptical control device in the variable optical attenuator 1100 canreduce the size of the apparatus. Therefore, the combination of thedevice with the demultiplexer 1101 and the multiplexer 1102 does notincrease the size of the apparatus.

Seventeenth Preferred Embodiment

FIG. 29 shows another construction of the optical inserting/separatingapparatus to which the waveguide-type optical control device accordingto the invention has been applied.

The construction of this optical inserting/separating apparatus shown inFIG. 29 is the same as that of the optical inserting/separatingapparatus shown in FIG. 28, except that a wavelength varying filter 1105is provided instead of the 1×2 optical switch 1103 as the opticaldemultiplexer and a filer 1106 is provided instead of the 2×1 opticalswitch 1104 as the optical multiplexer. The wavelength varying filter1105 functions to selectively separate an optical signal with apredetermined wavelength from optical signals demultiplexed by thedemultiplexer 1101. For the output light from the wavelength varyingfilter 1105, predetermined attenuation is carried out by the variableoptical attenuator 1100 and the attenuation level control circuit 1110.Further, an optical signal output from the variable light attenuator1100 or an externally inserted optical signal is selected by the filter1106 and is input into the multiplexer 1102. The multiplexer 1102 addsan optical signal output from other filter 1106 to this input opticalsignal, and the multiplexed optical signal is then output. Also in thisoptical inserting/separating apparatus, the use of the waveguide-typeoptical control device in the variable optical attenuator 1100 canreduce the size of the apparatus. Therefore, the combination of thedevice with the wavelength varying filter 1105 and the filter 1106 doesnot increase the size of the apparatus. Thus, a reduction in size and areduction in weight can be realized.

Also in this construction, the attenuation level control circuit 1110can perform control in such a manner that the levels of the opticalsignals to be output respectively from the variable optical attenuators1100 provide a preset level difference. The wavelength dependency of thegain of the optical amplifier and the wavelength dependency of thetransmission line loss can be improved, for example, by presetting theoptical level difference by taking into consideration the wavelengthdependency of the gain of the optical amplifier and the wavelengthdependency of the transmission line loss.

In the electrode construction according to the second and thirdpreferred embodiments of the invention, the shape of the secondelectrode 52 has been made different from the shape of the secondelectrode 52 in the first preferred embodiment of the invention.Alternatively, the shape of the first electrode 51 may be made differentfrom the electrode construction according to the first preferredembodiment of the invention.

Likewise, in the electrode construction according to the eighth andninth preferred embodiments of the invention, the shape of the secondelectrode 152 has been made different from the shape of the secondelectrode 152 in the seventh preferred embodiment of the invention.Alternatively, the shape of the first electrode 151 may be madedifferent from the electrode construction according to the seventhpreferred embodiment of the invention. Further, in connection with theconstructions shown in FIGS. 27 to 29, a combination of constructionsshown in FIGS. 27 to 29 may be adopted. Further, among the threeconstructions shown in FIGS. 27 to 29, two or all constructions may beadopted. In FIGS. 27 to 29, all the variable optical attenuatorsconnected to the demultiplexer 1101 are not always required to have anidentical construction, and a variation of the above-describedwaveguide-type optical control devices may be present.

In each of the above preferred embodiments, a variable opticalattenuator has been used as the waveguide-type optical control device.However, it should be noted that the invention is not limited to thevariable optical attenuator and can be applied to all of waveguide-typeoptical control devices for controlling light, which passes through theoptical waveguide, according to the voltage applied to the electrode.The invention can also be applied, for example, to optical switches andoptical intensity modulators which have been constructed with opticalwaveguides.

Further, in the above preferred embodiments, a directional coupler hasbeen provided in each of the optical branching section provided on theinput side of the phase shifting section and the optical couplingsection provided on the output side. Alternatively, the directionalcoupler may be provided in any one of the optical branching section andthe optical coupling section. For example, a Y branching device may beused on the input side or the output side in which the directionalcoupler has not been used. Specific examples thereof include: aone-input two-output construction wherein a Y branching device is usedin the optical branching section while the directional coupler accordingto the invention is used in the optical coupling section; and atwo-input one-output construction wherein the directional coupleraccording to the invention is used in the optical branching sectionwhile a Y branching device is used in the optical coupling section. Inany of these constructions, the problem of the production accuracy(yield) involved in the directional coupler can be reduced. Thus, thenecessary number of directional couplers can be advantageously reduced.

As described above, in the waveguide-type optical control deviceaccording to the first feature of the invention, the first, second, andthird electrodes are extended from the control unit into the first andsecond directional couplers so that the voltage applied to the phaseshifter as such is also applied to the first and second directionalcouplers. By virtue of this construction, the coupling length can beequivalently regulated to reduce a deterioration in extinction ratio.Further, since the number of electrodes in the directional coupler isidentical to that in the phase shifter, the size of the device is notincreased. Therefore, the size of the waveguide-type optical controldevice can be reduced, and, in addition, the complication of the controlsystem can be avoided, contributing to simplified control.

In the waveguide-type optical control device according to the secondfeature of the invention, the voltage applied to the electrode sectionin the phase shifting section is simultaneously applied to theelectrodes in the electrode portion in at least one directional coupler.By virtue of this construction, the refractive index in the directionalcoupler can be controlled without the need to separately provide acontrol system for the directional coupler, and the coupling length Lcan be equivalently regulated to reduce a deterioration in extinctionratio. Since the number of electrodes in the directional coupler isidentical to that in the phase shifter, the size of the device is notincreased. Therefore, the size of the waveguide-type optical controldevice can be reduced, and, in addition, the complication of the controlsystem can be avoided, contributing to simplified control.

In the variable optical attenuator according to the invention, thedirectional coupler comprises a second electrode section having threeelectrodes, i.e., a first electrode provided on the left side of theleft optical waveguide, a second electrode provided on the right side ofthe right optical waveguide, and a third electrode provided between thetwo optical waveguides, and the electrodes in this electrode section areseparately and electrically connected respectively to three electrodesof the first electrode section in the phase shifter, whereby the voltageapplied to the first electrode section in the phase shifter issimultaneously applied to the electrodes of the second electrode sectionin the directional coupler. By virtue of this construction, therefractive index in the directional coupler is controlled by the voltageapplied to the phase shifter to control the attenuation level of opticalsignals which pass through the optical waveguides. This can realize areduction in size of the variable optical attenuator, and thecomplication of the control system (attenuation level control circuit)can be avoided.

Further, in the optical equalizer and the optical inserting/separatingapparatus according to the invention, a variable optical attenuator,which has been constructed so as to apply a control voltage for commonuse in the electrode sections of the phase shifter and the directionalcouplers, is provided between the optical demultiplexer and the opticalmultiplexer so that the variable optical attenuator can control theoptical attenuation level to match the levels of the demultiplexedoptical signals. By virtue of this construction, the size of thevariable optical attenuator can be reduced, and the necessity ofincreasing the size of the optical equalizer or the opticalinserting/separating apparatus can be eliminated.

According to the waveguide-type optical control device according to theinvention, the first, second, and third electrodes in the phase shifterare extended into a part or the whole of the first directional coupleror the second directional coupler using common optical waveguides, and,at the same time, the extended portion of the third electrode in thedirectional coupler is provided so that a longitudinal electric field isapplied to one of the optical waveguides. Therefore, an electric fieldfor controlling the refractive index is applied, by the voltage appliedto the electrodes in the phase shifter, from the vertical direction(thicknesswise direction of the electrode) to the first or seconddirectional coupler, and, in the case of an identical voltage, a strongelectric field can be applied while, in the case of an identicalelectric field, the applied voltage can be lowered. Further, since thecoupling length L is equivalently regulated, a deterioration inextinction ratio can be reduced. Further, since insulation between theelectrodes in the phase shifter and the electrodes in the directionalcoupler is not required, there is no need to provide a space betweenthese electrodes. This can eliminate the need to increase the size ofthe waveguide-type optical control device, and, in addition, thecomplication of the control system can be avoided.

In the production process of a waveguide-type optical control deviceaccording to the invention, after a phase shifter and directionalcouplers are formed by two optical waveguides, the first, second, andthird electrodes are formed respectively in predetermined regions of thephase shifter and the directional couplers. In the directional couplers,a plurality of electrode pieces are connected in a cascade form to theend of the first electrode and the end of the second electrode through afuse or a bonding wire. By virtue of this construction, the electricfield forming region can be varied by finely adjusting the length of thefirst electrode and the length of the second electrode. As a result,tuning can be performed to provide ideal characteristics.

The invention has been described in detail with particular reference topreferred embodiments, but it will be understood that variations andmodifications can be effected within the scope of the invention as setforth in the appended claims.

What is claimed is:
 1. A waveguide-type optical control devicecomprising: first and second directional couplers provided while leavinga predetermined spacing therebetween, said first and second directionalcouplers being constituted respectively by two right and left opticalwaveguides provided on a substrate; and a control unit provided betweenthe first directional coupler and the second directional coupler, first,second, and third electrodes being provided respectively on the leftside of the left optical waveguide, on the right side of the rightoptical waveguide, and between the two optical waveguides, said controlunit functioning to control light, which passes through the two opticalwaveguides, according to a voltage applied to the first, second, andthird electrodes, said first, second, and third electrodes beingextended into the first and second directional couplers.
 2. Thewaveguide-type optical control device according to claim 1, wherein thefirst and second electrodes are different from each other in shape. 3.The waveguide-type optical control device according to claim 1, whereinthe first, second, and third electrodes are extended to a portion nearthe boundary between the first directional coupler and the control unitand the boundary between the second directional coupler and the controlunit.
 4. The waveguide-type optical control device according to claim 1,wherein the first, second, and third electrodes have been offset to theright or left side with respect to the center line between the twooptical waveguides.
 5. The waveguide-type optical control deviceaccording to claim 1, wherein the control unit is a phase shifter thatcontrols the quantity of light, which passes through the two opticalwaveguides, according to the applied voltage.
 6. A waveguide-typeoptical control device comprising: a phase shifter provided with a firstelectrode section comprising an electrode provided on the left side of aleft optical waveguide, an electrode provided on the right side of aright optical waveguide, and an electrode provided between the twooptical waveguides; and a directional coupler comprising two opticalwaveguides which are connected respectively to the two right and leftoptical waveguides in the phase shifter and are provided parallel toeach other with the spacing between the two optical waveguides beingpartially reduced, said directional coupler being used in at least oneof an optical branching section provided on the input side of the phaseshifter and an optical coupling section provided on the output side ofthe phase shifter, the refractive index of the two optical waveguidesbeing varied according to a voltage applied across the electrodesprovided respectively on the left side of the left optical waveguide andthe right side of the right optical waveguide and the electrode providedbetween the two optical waveguides in the phase shifter, saiddirectional coupler being provided with a second electrode sectioncomprising an electrode provided on the left side of the left opticalwaveguide, an electrode provided on the right side of the right opticalwaveguide, and an electrode provided between the two optical waveguides,the three electrodes constituting the second electrode section beingelectrically connected respectively to the three electrodes constitutingthe first electrode section provided adjacent to the second electrodesection in the longitudinal direction of the two optical waveguides, thevoltage applied to the first electrode section being applied to thesecond electrode section.
 7. The waveguide-type optical control deviceaccording to claim 6, wherein the second electrode section has beenformed by extending the electrodes constituting the first electrodesection.
 8. The waveguide-type optical control device according to claim6, wherein the second electrode section has a construction such that theshape of the electrode provided on the left side of the left opticalwaveguide and the shape of the electrode provided on the right side ofthe right optical waveguide are asymmetrical.
 9. The waveguide-typeoptical control device according to claim 6, wherein the secondelectrode section is provided only at a portion near the boundarybetween the directional coupler and the phase shifter.
 10. Thewaveguide-type optical control device according to claim 6, wherein thefirst electrode section and the second electrode section have beenoffset by a predetermined level with respect to the center line betweenthe two optical waveguides.
 11. The waveguide-type optical controldevice according to claim 6, wherein, in the second electrode section,the electrode provided on the left side of the left optical waveguideand the electrode provided on the right side of the right opticalwaveguide each comprise a plurality of electrode pieces which arearranged at a predetermined interval and have been connected to eachother or one another through a fuse or a bonding wire.
 12. Thewaveguide-type optical control device according to claim 6, wherein theelectrode provided between the optical waveguides in the secondelectrode section partially or entirely overlaps with one of the twooptical waveguides in the thicknesswise direction thereof.
 13. Thewaveguide-type optical control device according to claim 6, wherein thesecond electrode section is disposed on the surface of a substrate onwhich the two optical waveguides are provided through a buffer layer.14. The waveguide-type optical control device according to claim 6,wherein each of the electrodes constituting the second electrode sectionis disposed so as to be substantially coplanar with the two opticalwaveguides.
 15. The waveguide-type optical control device according toclaim 14, wherein the electrodes constituting the second electrodesection are provided within respective concaves provided on the surfaceof a substrate on which the two optical waveguides are provided.
 16. Thewaveguide-type optical control device according to claim 6, wherein thesecond electrode section is disposed on the backside of a substrate onwhich the two optical waveguides are provided.
 17. The waveguide-typeoptical control device according to claim 6, wherein the directionalcoupler is provided in each of the optical branching section and theoptical coupling section and both the directional couplers are providedwith the second electrode section.
 18. A waveguide-type optical controldevice comprising: a phase shifter comprising two left and right opticalwaveguides, a first electrode provided on the left side of the leftoptical waveguide, a second electrode provided on the right side of theright optical waveguide, and a third electrode provided between the twooptical waveguides; a first directional coupler that is connected to oneend of the phase shifter and functions to branch an optical signalintroduced through one of the two optical waveguides into optical signalparts which are then introduced respectively into the two opticalwaveguides; and a second directional coupler that is connected to theother end of the phase shifter and functions to couple the opticalsignal parts received respectively from the two optical waveguides, atleast one of the first and second electrodes and the third electrodehaving been extended into a part or the whole of the first directionalcoupler or the second directional coupler.
 19. A waveguide-type opticalcontrol device comprising: a phase shifter comprising two left and rightoptical waveguides, a first electrode provided on the left side of theleft optical waveguide, a second electrode provided on the right side ofthe right optical waveguide, and a third electrode provided between thetwo optical waveguides; a first directional coupler that is connected toone end of the phase shifter and functions to branch an optical signalintroduced through one of the two optical waveguides into optical signalparts which are then introduced respectively into the two opticalwaveguides; and a second directional coupler that is connected to theother end of the phase shifter and functions to couple the opticalsignal parts received respectively from the two optical waveguides, atleast one of the first and second electrodes and the third electrodehaving been extended into a part or the whole of the first directionalcoupler, at least one of the first and second electrodes and the thirdelectrode having been extended into a part or the whole of the seconddirectional coupler.
 20. The device of claim 18, wherein, within saidfirst directional coupler, said two optical waveguides converge towardeach other, maintain a coupling distance, and diverge from each other,and within said second directional coupler, said two optical waveguidesconverge toward each other, maintain a coupling distance, and divergefrom each other, and wherein at least one of said first and secondelectrodes extends into at least one of said first and seconddirectional couplers to where said two optical waveguides maintain acoupling distance.
 21. The device of claim 19, wherein, within saidfirst directional coupler, said two optical waveguides converge towardeach other, maintain a coupling distance, and diverge from each other,and within said second directional coupler, said two optical waveguidesconverge toward each other, maintain a coupling distance, and divergefrom each other, and wherein at least one of said first and secondelectrodes extends into said first directional coupler to where said twooptical waveguides maintain a coupling distance and wherein at least oneof said first and second electrodes extends into said second directionalcoupler to where said two optical waveguides maintain a couplingdistance.
 22. A waveguide-type optical control device comprising: aphase shifter comprising two left and right optical waveguides, a firstelectrode provided on the left side of the left optical waveguide, asecond electrode provided on the right side of the right opticalwaveguide, and a third electrode provided between the two opticalwaveguides; a first directional coupler that is connected to one end ofthe phase shifter and functions to branch an optical signal introducedthrough one of the two optical waveguides into optical signal partswhich are then introduced respectively into the two optical waveguides;and a second directional coupler that is connected to the other end ofthe phase shifter and functions to couple the optical signal partsreceived respectively from the two optical waveguides, said firstdirectional coupler comprising, in its directional coupling section,second directional coupling section outer electrodes disposedrespectively at a portion near the left side of the left opticalwaveguide and at a portion near the right side of the right opticalwaveguide in the first directional coupling section and a firstdirectional coupling section intermediate electrode disposed between thetwo optical waveguides in the first directional coupling section, saidfirst electrode and said second electrode having been electricallyconnected respectively to the first directional coupling section outerelectrodes, said third electrode having been electrically connected tothe first directional coupling section intermediate electrode.
 23. Thewaveguide-type optical control device according to claim 22, wherein thefirst directional coupling section outer electrodes and the firstdirectional coupling section intermediate electrode apply a voltage to apart of the optical waveguides constituting the directional couplingsection to cause an electric field.
 24. A waveguide-type optical controldevice comprising: a phase shifter comprising two left and right opticalwaveguides, a first electrode provided on the left side of the leftoptical waveguide, a second electrode provided on the right side of theright optical waveguide, and a third electrode provided between the twooptical waveguides; a first directional coupler that is connected to oneend of the phase shifter and functions to branch an optical signalintroduced through one of the two optical waveguides into optical signalparts which are then introduced respectively into the two opticalwaveguides; and a second directional coupler that is connected to theother end of the phase shifter and functions to couple the opticalsignal parts received respectively from the two optical waveguides, saidsecond directional coupler comprising, in its directional couplingsection, second directional coupling section outer electrodes disposedrespectively at a portion near the left side of the left opticalwaveguide and at a portion near the right side of the right opticalwaveguide in the second directional coupling section and a seconddirectional coupling section intermediate electrode disposed between thetwo optical waveguides in the second directional coupling section, saidfirst electrode and said second electrode having been electricallyconnected respectively to the second directional coupling section outerelectrodes, said third electrode having been electrically connected tothe second directional coupling section intermediate electrode.
 25. Thewaveguide-type optical control device according to claim 24, wherein thesecond directional coupling section outer electrodes and the seconddirectional coupling section intermediate electrode apply a voltage to apart of the optical waveguides constituting the directional couplingsection to cause an electric field.
 26. The waveguide-type opticalcontrol device according to claim 22, wherein the first directionalcoupling section intermediate electrode has been offset with respect tothe center line between the two optical waveguides constituting thefirst directional coupling section.
 27. The waveguide-type opticalcontrol device according to claim 24 or 25, wherein the seconddirectional coupling section intermediate electrode has been offset withrespect to the center line between the two optical waveguidesconstituting the second directional coupling section.
 28. Awaveguide-type optical control device comprising: a phase shiftercomprising two left and right optical waveguides, a first electrodeprovided on the left side of the left optical waveguide, a secondelectrode provided on the right side of the right optical waveguide, anda third electrode provided between the two optical waveguides; a firstdirectional coupler that is connected to one end of the phase shifterand functions to branch an optical signal introduced through one of thetwo optical waveguides into optical signal parts which are thenintroduced respectively into the two optical waveguides; and a seconddirectional coupler that is connected to the other end of the phaseshifter and functions to couple the optical signal parts receivedrespectively from the two optical waveguides, at least one of the firstand second electrodes and the third electrode having been extended intoa part or the whole of the first directional coupler or the seconddirectional coupler, the third electrode in its extended electrodeportion being provided so that a longitudinal electric field is appliedto one of the two optical waveguides.
 29. The device of claim 28,wherein, within said first directional coupler, said two opticalwaveguides converge toward each other, maintain a coupling distance, anddiverge from each other, and within said second directional coupler,said two optical waveguides converge toward each other, maintain acoupling distance, and diverge from each other, wherein said thirdelectrode extends into at least one of said first and second directionalcouplers to where said two optical waveguides maintain a couplingdistance.
 30. The waveguide-type optical control device according toclaim 28, wherein the third electrode in its extended electrode portionis disposed on the top surface or the backside of one of the two opticalwaveguides so as to overlap therewith.